Patent Assignment
Reel/Frame 031664/0554
Assignment of Assignor's Interest
Recorded: 2013-11-25
Pages: 9
Assignors
BERRY, IVAN
Executed: 2013-11-19
ESCORCIA, ORLANDO
Executed: 2013-11-19
HAN, KEPING
Executed: 2013-11-19
HOU, JIANAN
Executed: 2013-11-19
LUO, SHIJIAN
Executed: 2013-11-19
WALDFRIED, CARLO
Executed: 2013-11-19
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Plasma Mediated Ashing Processes That Include Formation of a Protective Layer Before and/or During the Plasma Mediated Ashing Process