Patent Assignment
Reel/Frame 031849/0413
Assignment of Assignor's Interest
Recorded: 2013-12-26
Pages: 3
Assignor
ZHOU, MING
Executed: 2013-12-20
Assignee
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
18 ZHANGJIANG ROAD, PUDONG NEW AREA,, SHANGHAI, 201203, CHINA
Covered Property
(1)
Semiconductor Structures and Fabrication Methods for Improving Undercut Between Porous Film and Hardmask Film