Patent Assignment
Reel/Frame 031893/0954
Assignment of Assignor's Interest
Recorded: 2014-01-06
Pages: 8
Assignors
BULOVIC, VLADIMIR
Executed: 2009-01-28
CHEN, JIANGLONG
Executed: 2008-10-16
MADIGAN, CONOR FRANCIS
Executed: 2008-10-16
SCHMIDT, MARTIN A.
Executed: 2008-10-16
Assignee
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
77 MASSACHUSETTS AVENUE, CAMBRIDGE, MASSACHUSETTS, 02139
Covered Property
(1)
Method and Apparatus for Depositing Films
Application:
13/707,562 →
Publication:
US 2013/0209668