Patent Assignment
Reel/Frame 031907/0270
Assignment of Assignor's Interest
Recorded: 2014-01-07
Pages: 4
Assignors
ERSHOV, ALEXANDER
Executed: 2013-12-10
EVANS, DAVID
Executed: 2013-12-19
GRAHAM, MATTHEW
Executed: 2013-12-12
Assignee
CYMER LLC
17075 THORNMINT COURT, SAN DIEGO, CALIFORNIA, 92127
Covered Property
(1)
Apparatus for and Method of Source Material Delivery in a Laser Produced Plasma Euv Light Source
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.