Patent Assignment
Reel/Frame 031982/0585
Assignment of Assignor's Interest
Recorded: 2014-01-16
Pages: 5
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Pattern Forming Process