Patent Assignment
Reel/Frame 032011/0744
Assignment of Assignor's Interest
Recorded: 2014-01-21
Pages: 4
Assignors
SPURLIN, TIGHE A.
Executed: 2013-11-21
ANTONELLI, GEORGE ANDREW
Executed: 2013-11-22
DOUBINA, NATALIA
Executed: 2013-11-21
DUNCAN, JAMES E.
Executed: 2013-11-22
REID, JONATHAN D.
Executed: 2013-11-21
PORTER, DAVID
Executed: 2013-11-22
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method and Apparatus for Remote Plasma Treatment for Reducing Metal Oxides on a Metal Seed Layer