Patent Assignment
Reel/Frame 032052/0759
Assignment of Assignor's Interest
Recorded: 2014-01-27
Pages: 5
Assignors
LYNDAKER, BRADFORD J.
Executed: 2014-01-08
VALCORE, JOHN C., JR.
Executed: 2014-01-25
MARAKHTANOV, ALEXEI
Executed: 2014-01-09
JAFARIAN-TEHRANI, SEYED JAFAR
Executed: 2014-01-08
CHEN, ZHIGANG
Executed: 2014-01-09
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Control of Etch Rate Using Modeling, Feedback and Impedance Match