Patent Assignment
Reel/Frame 032109/0820
Assignment of Assignor's Interest
Recorded: 2014-01-31
Pages: 6
Assignors
KANG, HU
Executed: 2013-11-12
SWAMINATHAN, SHANKAR
Executed: 2014-01-31
LAVOIE, ADRIEN
Executed: 2013-11-12
HENRI, JON
Executed: 2013-11-18
Assignee
NOVELLUS SYSTEMS, INC.
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods for Depositing Films on Sensitive Substrates