Patent Assignment
Reel/Frame 032196/0481
Assignment of Assignor's Interest
Recorded: 2014-02-11
Pages: 3
Assignor
MADSEN, ERIC RUSSELL
Executed: 2014-02-11
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Ball Screw Showerhead Module Adjuster Assembly for Showerhead Module of Semiconductor Substrate Processing Apparatus