Patent Assignment
Reel/Frame 032288/0672
Assignment of Assignor's Interest
Recorded: 2014-02-25
Pages: 2
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Treatment Method, Non-Transitory Computer Storage Medium and Substrate Treatment System