Assignment of Assignor's Interest

Recorded: 2014-02-27 Pages: 3

Assignors

DINH, THUC M.

Executed: 2014-01-29

MA, YAMIN

Executed: 2014-01-29

LIU, BENJAMIN Y.H.

Executed: 2014-01-29

Assignee

MSP CORPORATION

5910 RICE CREEK PARKWAY, SHOREVIEW, MINNESOTA, 55126

Covered Property (1)

Method and Apparatus for Vapor Generation and Wafer Cleaning

Patent: 8,945,281 →

Application: 14/168,692 →

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.