Patent Assignment
Reel/Frame 032381/0156
Assignment of Assignor's Interest
Recorded: 2014-03-07
Pages: 6
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Non-Transitory Computer-Readable Recording Medium
Application:
14/201,017 →
Publication:
US 2015/0187567