Assignment of Assignor's Interest

Recorded: 2014-03-11 Pages: 3

Assignors

KOBAYASHI, KENJI

Executed: 2014-03-03

MIURA, TAKEMITSU

Executed: 2014-03-03

Assignee

DAINIPPON SCREEN MFG. CO., LTD.

TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN

Covered Property (1)

Substrate Processing Apparatus and Substrate Processing Method

Application: 14/203,720 →

Publication: US 2014/0273498

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.