Patent Assignment
Reel/Frame 032416/0090
Assignment of Assignor's Interest
Recorded: 2014-03-12
Pages: 5
Assignors
BUSCHE, MATTHEW J.
Executed: 2014-01-30
PARKHE, VIJAY D.
Executed: 2014-01-31
RICE, MICHAEL R.
Executed: 2014-02-11
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Apparatus and Method for Measurement of the Thermal Performance of an Electrostatic Wafer Chuck