Patent Assignment
Reel/Frame 032538/0111
Assignment of Assignor's Interest
Recorded: 2014-03-27
Pages: 3
Assignors
CHEN, JIAN J.
Executed: 2014-03-25
ROCHA- ALVAREZ, JUAN CARLOS
Executed: 2014-03-26
AYOUB, MOHAMAD A.
Executed: 2014-03-25
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Apparatus and Method for Tuning Electrode Impedance for High Frequency Radio Frequency and Terminating Low Frequency Radio Frequency to Ground