Patent Assignment
Reel/Frame 032551/0753
Assignment of Assignor's Interest
Recorded: 2014-03-27
Pages: 3
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILIPITAS, CALIFORNIA, 95035
Covered Property
(1)
Adaptive Sampling for Semiconductor Inspection Recipe Creation, Defect Review, and Metrology