Patent Assignment
Reel/Frame 032608/0086
Assignment of Assignor's Interest
Recorded: 2014-04-04
Pages: 6
Assignors
RALEY, ANGELIQUE DENISE
Executed: 2014-01-28
MORI, TAKUYA
Executed: 2014-01-30
OHTAKE, HIROTO
Executed: 2014-01-28
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Highly Selective Spacer Etch Process with Reduced Sidewall Spacer Slimming
Application:
14/150,027 →
Publication:
US 2014/0120728
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.