Patent Assignment
Reel/Frame 032770/0942
Assignment of Assignor's Interest
Recorded: 2014-04-28
Pages: 3
Assignee
TECHEST. CO., LTD
51-12, JIMUN-RO, WONGOK-MYEON, ANSEONG-SI, GYEONGGI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Temperature Control System for Semiconductor Manufacturing System