Patent Assignment
Reel/Frame 032873/0863
Assignment of Assignor's Interest
Recorded: 2014-05-12
Pages: 6
Assignors
MOTOYAMA, YUTAKA
Executed: 2014-04-10
SUZUKI, KEISUKE
Executed: 2014-04-07
FUKUSHIMA, KOHEI
Executed: 2014-04-10
HISHIYA, SHINGO
Executed: 2014-04-28
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Driving Method of Vertical Heat Treatment Apparatus, Storage Medium and Vertical Heat Treatment Apparatus