Patent Assignment
Reel/Frame 032919/0768
Assignment of Assignor's Interest
Recorded: 2014-05-19
Pages: 3
Assignor
OZAWA, KAZUYOSHI
Executed: 2014-01-06
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Exposure Method, Exposure Apparatus, and Device Manufacturing Method