Patent Assignment
Reel/Frame 032975/0858
Assignment of Assignor's Interest
Recorded: 2014-05-28
Pages: 4
Assignors
INATOMI, YUICHIRO
Executed: 2014-05-16
TANAKA, TAKASHI
Executed: 2014-05-16
IWASHITA, MITSUAKI
Executed: 2014-05-16
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plating Apparatus, Plating Method and Storage Medium