Patent Assignment
Reel/Frame 033047/0363
Assignment of Assignor's Interest
Recorded: 2014-06-06
Pages: 4
Assignors
YAMADA, NORIKAZU
Executed: 2014-06-02
TACHIKAWA, TOSHIFUMI
Executed: 2014-06-02
NAGAMI, KOICHI
Executed: 2014-06-02
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Method and Plasma Processing Apparatus