Patent Assignment
Reel/Frame 033154/0376
Assignment of Assignor's Interest
Recorded: 2014-06-23
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Film Forming Apparatus, Film Forming Method and Non-Transitory Storage Medium