Patent Assignment
Reel/Frame 033185/0177
Assignment of Assignor's Interest
Recorded: 2014-06-26
Pages: 10
Assignors
YAMADA, NORIKAZU
Executed: 2014-06-18
TACHIKAWA, TOSHIFUMI
Executed: 2014-06-18
NAGAMI, KOICHI
Executed: 2014-06-18
IKENARI, TATSUYA
Executed: 2014-06-23
MAEHARA, DAISUKE
Executed: 2014-06-23
Assignees
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
DAIHEN CORPORATION
2-1-11, TAGAWA, YODOGAWA-KU, OSAKA-SHI, OSAKA, 532-8512, JAPAN
Covered Property
(1)
Plasma Processing Apparatus