Patent Assignment
Reel/Frame 033228/0065
Assignment of Assignor's Interest
Recorded: 2014-07-02
Pages: 2
Assignor
HABETS, BORIS
Executed: 2012-08-09
Assignee
QONIAC GMBH
FETSCHERSTRASSE 72, DRESDEN, 01307, GERMANY
Covered Property
(1)
Method and Apparatus for Simulation of Lithography Overlay