Patent Assignment
Reel/Frame 033270/0672
Assignment of Assignor's Interest
Recorded: 2014-07-09
Pages: 3
Assignors
KANEKO, KAZUSHI
Executed: 2014-07-02
IWAO, TOSHIHIKO
Executed: 2014-07-03
KAWAKAMI, SATORU
Executed: 2014-07-03
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Microwave Plasma Processing Apparatus and Microwave Supplying Method