Patent Assignment
Reel/Frame 033278/0941
Assignment of Assignor's Interest
Recorded: 2014-07-07
Pages: 4
Assignors
YOKOTA, AKIHIRO
Executed: 2014-07-03
ITO, ETSUJI
Executed: 2014-07-03
HIMORI, SHINJI
Executed: 2014-07-03
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus
Application:
14/370,579 →
Publication:
US 2014/0346040