Patent Assignment
Reel/Frame 033339/0704
Assignment of Assignor's Interest
Recorded: 2014-07-18
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Microwave Plasma Processing Apparatus, Slot Antenna, and Semiconductor Device