Patent Assignment
Reel/Frame 033369/0928
Assignment of Assignor's Interest
Recorded: 2014-07-23
Pages: 3
Assignors
LIU, HUA-YU
Executed: 2010-09-03
CHEN, LUOQI
Executed: 2010-09-03
CHEN, HONG
Executed: 2010-09-03
LI, ZHI-PAN
Executed: 2010-09-02
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, 5504 DR, NETHERLANDS
Covered Property
(1)
Method of Pattern Selection for Source and Mask Optimization