Patent Assignment
Reel/Frame 033420/0118
Assignment of Assignor's Interest
Recorded: 2014-07-30
Pages: 2
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Element for Uv or Euv Lithography with Coatings Having Optimized Stress and Thickness