Patent Assignment
Reel/Frame 033430/0267
Assignment of Assignor's Interest
Recorded: 2014-07-31
Pages: 2
Assignors
SHEN, ZE
Executed: 2014-06-19
ONO, TETSUO
Executed: 2014-06-20
YASUNAMI, HISAO
Executed: 2014-06-20
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Dry Etching Method
Application:
14/447,681 →
Publication:
US 2015/0099368