Assignment of Assignor's Interest

Recorded: 2014-08-01 Pages: 3

Assignors

YOSHIZUMI, ASUKA

Executed: 2014-07-15

HIGUCHI, AYUMI

Executed: 2014-07-23

Assignee

DAINIPPON SCREEN MFG. CO., LTD.

TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO 602-8585, JAPAN

Covered Property (1)

Substrate Processing Apparatus and Substrate Processing Method for Performing Cleaning Treatment on Substrate

Patent: 9,508,568 →

Application: 14/449,210 →

Publication: US 2015/0040951

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.