Patent Assignment
Reel/Frame 033499/0253
Assignment of Assignor's Interest
Recorded: 2014-08-08
Pages: 4
Assignors
KUO, HUNG-MING
Executed: 2014-07-21
PENG, JUI-CHUN
Executed: 2014-07-21
LIU, HENG-HSIN
Executed: 2014-07-21
LEE, YUNG-YAO
Executed: 2014-07-21
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD.6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Focus Metrology Method and Photolithography Method and System