Patent Assignment
Reel/Frame 033524/0745
Assignment of Assignor's Interest
Recorded: 2014-08-13
Pages: 6
Assignors
RAMASWAMY, KARTIK
Executed: 2014-08-04
YANG, YANG
Executed: 2014-08-04
LANE, STEVEN
Executed: 2014-08-04
WONG, LAWRENCE
Executed: 2014-08-04
AUBUCHON, JOSEPH F.
Executed: 2014-08-04
KOH, TRAVIS
Executed: 2014-08-04
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
System and Method for Selective Coil Excitation in Inductively Coupled Plasma Processing Reactors