Patent Assignment
Reel/Frame 033588/0866
Assignment of Assignor's Interest
Recorded: 2014-08-22
Pages: 8
Assignors
SOMERVELL, MARK
Executed: 2014-08-19
BROWN, IAN
Executed: 2014-08-12
SIMMS, IHSAN
Executed: 2014-08-21
NEGREIRA, AINHOA
Executed: 2014-08-18
NAFUS, KATHLEEN
Executed: 2014-08-19
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
UV-Assisted Stripping of Hardened Photoresist to Create Chemical Templates for Directed Self-Assembly