Patent Assignment
Reel/Frame 033601/0930
Assignment of Assignor's Interest
Recorded: 2014-08-25
Pages: 3
Assignee
FOSS ANALYTICAL A/S
FOSS ALLE 1, HILLEROED, DK-3400, DENMARK
Covered Property
(1)
Method of Controlling a Production Process Using Prediction Model Output Directly Linking Interacted Probe Radiation Information with Morphological Process Step Control Parameters