Patent Assignment
Reel/Frame 033604/0907
Assignment of Assignor's Interest
Recorded: 2014-08-25
Pages: 3
Assignors
KAPOOR, SUNIL
Executed: 2014-08-08
LEESER, KARL F.
Executed: 2014-08-11
LAVOIE, ADRIEN
Executed: 2014-08-11
RANGINENI, YASWANTH
Executed: 2014-08-11
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Multi-Station Plasma Reactor with Rf Balancing