Patent Assignment
Reel/Frame 033732/0508
Assignment of Assignor's Interest
Recorded: 2014-09-12
Pages: 12
Assignors
CORLISS, DANIEL A.
Executed: 2014-09-12
DESHPANDE, SADANAND V.
Executed: 2014-08-18
DESHPANDE, VEERESH V.
Executed: 2014-08-07
GLUSCHENKOV, OLEG
Executed: 2014-08-12
KRISHNAN, SIVARAMA
Executed: 2014-07-31
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Dual Pulse Driven Extreme Ultraviolet (Euv) Radiation Source Utilizing a Droplet Comprising a Metal Core with Dual Concentric Shells of Buffer Gas