Patent Assignment
Reel/Frame 033748/0983
Assignment of Assignor's Interest
Recorded: 2014-09-16
Pages: 3
Assignors
FUJIWARA, TOMONORI
Executed: 2014-07-01
SHIBAYAMA, NOBUYUKI
Executed: 2014-06-25
YOSHIDA, YUKIFUMI
Executed: 2014-06-25
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.