Patent Assignment
Reel/Frame 033777/0010
Assignment of Assignor's Interest
Recorded: 2014-09-19
Pages: 3
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Lithography Device with Eddy-Current Brake