Assignment of Assignor's Interest

Recorded: 2014-09-19 Pages: 3

Assignors

KATO, MASAHIKO

Executed: 2014-08-20

MIYA, KATSUHIKO

Executed: 2014-08-14

YASHIKI, HIROYUKI

Executed: 2014-08-20

Assignee

DAINIPPON SCREEN MFG. CO., LTD

TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN

Covered Property (1)

Substrate Processing Apparatus and Substrate Processing Method

Application: 14/332,840 →

Publication: US 2015/0020850

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.