Patent Assignment
Reel/Frame 033780/0895
Assignment of Assignor's Interest
Recorded: 2014-09-19
Pages: 3
Assignors
KANEKO, KAZUSHI
Executed: 2014-09-09
FUNAZAKI, KAZUNORI
Executed: 2014-09-09
KATO, HIDEO
Executed: 2014-09-09
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and High Frequency Generator