Modifying Conversion

Recorded: 2014-10-06 Pages: 6

Assignor

CARL ZEISS SMT AG

Executed: 2010-10-14

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Microlithography Projection Optical System and Method for Manufacturing a Device

Application: 14/298,185 →

Publication: US 2014/0327898

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.