Patent Assignment
Reel/Frame 034041/0087
Assignment of Assignor's Interest
Recorded: 2014-10-27
Pages: 7
Assignors
YAMASAKI, RYO
Executed: 2014-10-15
INABA, MITSUHARU
Executed: 2014-10-15
TAGUCHI, KENSUKE
Executed: 2014-10-15
Assignee
TOCALO CO., LTD.
13-4, FUKAE-KITAMACHI 4-CHOME, HIGASHINADA-KU, KOBE-SHI, HYOGO, 6580013, JAPAN
Covered Property
(1)
Electrostatic Chuck and Method of Manufacturing Electrostatic Chuck