Patent Assignment
Reel/Frame 034148/0651
Assignment of Assignor's Interest
Recorded: 2014-11-11
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Non-Ambipolar Plasma Ehncanced Dc/Vhf Phasor