Patent Assignment
Reel/Frame 034255/0224
Assignment of Assignor's Interest
Recorded: 2014-11-25
Pages: 3
Assignors
SENTOKU, KOICHI
Executed: 2014-06-26
OHSAKI, YOSHINORI
Executed: 2014-06-27
MORIMOTO, OSAMU
Executed: 2014-06-30
MATSUMOTO, TAKAHIRO
Executed: 2014-06-26
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Calibration Method, Measurement Apparatus, Exposure Apparatus, and Method of Manufacturing Article