Patent Assignment
Reel/Frame 034279/0617
Modifying Conversion
Recorded: 2014-11-17
Pages: 6
Assignor
CARL ZEISS SMT AG
Executed: 2010-10-14
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Microlithography Projection Optical System, Tool and Method of Production
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.