Patent Assignment
Reel/Frame 034512/0306
Assignment of Assignor's Interest
Recorded: 2014-12-16
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method, and Computer-Readable Storage Medium Storing Substrate Processing Program