Patent Assignment
Reel/Frame 034574/0023
Assignment of Assignor's Interest
Recorded: 2014-12-23
Pages: 3
Assignors
GEUPPERT, BERNHARD
Executed: 2014-12-10
LIMBACH, GUIDO
Executed: 2014-12-12
WOELFLE, HARALD
Executed: 2014-12-18
DEUFEL, PETER
Executed: 2014-12-10
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Method for Replacing Objective Parts