Patent Assignment
Reel/Frame 034776/0186
Assignment of Assignor's Interest
Recorded: 2015-01-21
Pages: 3
Assignor
KIKUCHI, HIROSHI
Executed: 2014-12-23
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Heat Treatment Apparatus, Method of Installing Substrate Heat Treatment Apparatus